Beginning with an introduction that outlines the primary motivations towards downscaling micro electromechanical systems (MEMS) sensors, and the issues that research faces when doing so, this title presents nano-resonators and describe author's first implementation in the field of inertial sensing, along with the associated shortcomings.
- Limba : Engleza
- Data Publicarii : 04 Aug 2014
- Format : Hardback
- Numar pagini : 228
- ISBN : 9781848216310