Soft X-Rays and Extreme Ultraviolet Radiation

David Attwood

This self-contained, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The book will be of great interest to graduate students, researchers and practising engineers.
  • Limba : Engleza
  • Data Publicarii : 22 Feb 2007
  • Format : Paperback
  • Numar pagini : 504
  • ISBN : 9780521029971
321.99 Lei
Disponibilitate : 2-4 saptamani

Acest produs este disponibil in stocul furnizorilor si poate fi livrat in 2-4 saptamani