This self-contained, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The book will be of great interest to graduate students, researchers and practising engineers.
- Limba : Engleza
- Data Publicarii : 22 Feb 2007
- Format : Paperback
- Numar pagini : 504
- ISBN : 9780521029971