Soft X-Rays and Extreme Ultraviolet Radiation

David Attwood

This self-contained, comprehensive book describes the fundamental properties of soft X-rays and extreme ultraviolet (EUV) radiation and discusses their applications in a wide variety of fields, including EUV lithography for semiconductor chip manufacture and soft X-ray biomicroscopy. The book will be of great interest to graduate students, researchers and practising engineers.
  • Limba : Engleza
  • Data Publicarii : 22 Feb 2007
  • Format : Paperback
  • Numar pagini : 504
  • ISBN : 9780521029971
Rating:
321.99 Lei
Disponibilitate : La comanda

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