This book covers the chemistry of the major processes involved in the manufacture of integrated circuits. The authors describe all the major processes in use, together with some processes which are currently being developed and hold future promise.
- Limba : Engleza
- Data Publicarii : 01 Jul 1987
- Editie : 1989 ed.
- Format : Hardback
- Numar pagini : 426
- ISBN : 9780216920057
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