Nano Electro Mechanical Systems

Sebastien Hentz

Beginning with an introduction that outlines the primary motivations towards downscaling micro electromechanical systems (MEMS) sensors, and the issues that research faces when doing so, this title presents nano-resonators and describe author's first implementation in the field of inertial sensing, along with the associated shortcomings.
  • Limba : Engleza
  • Data Publicarii : 04 Aug 2014
  • Format : Hardback
  • Numar pagini : 228
  • ISBN : 9781848216310
399.99 Lei
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